Keywords
integrated optics, guided waves, integrated optics devices, planar waveguides, photonic integrated circuits, total internal reflection
Abstract
A compact and low loss silicon-on-insulator rib waveguide 90° bend is designed and demonstrated. An interface realized by a trench filled with SU8 at the corner of a waveguide bend effectively reflects incoming light through total internal reflection (TIR). In order to accurately position the SU8-filled trench relative to the waveguide and reduce sidewall roughness of the interface, electron beam lithography (EBL) is employed while inductively coupled plasma reactive ion etching (ICP RIE) is used to achieve a vertical sidewall. The measured loss for TE polarization is 0.32 dB ± 0.02 dB/bend at a wavelength of 1.55 µm.
Original Publication Citation
Yusheng Qian, Seunghyun Kim, Jiquo Song, Gregory P. Nordin, and Jianhua Jiang, "Compact and low loss silicon-on-insulator ridge waveguide 9° bend," Optics Express 14, pp. 62-628 (26).
BYU ScholarsArchive Citation
Qian, Yusheng; Kim, Seunghyun; Song, Jiguo; Nordin, Gregory P.; and Jiang, Jianhua, "Compact and low loss silicon-on-insulator rib waveguide 90° bend" (2006). Faculty Publications. 1420.
https://scholarsarchive.byu.edu/facpub/1420
Document Type
Peer-Reviewed Article
Publication Date
2006-06-26
Permanent URL
http://hdl.lib.byu.edu/1877/3330
Publisher
Optical Society of America
Language
English
College
Ira A. Fulton College of Engineering and Technology
Department
Electrical and Computer Engineering
Copyright Status
This paper was published in Optics Express and is made available as an electronic reprint with the permission of OSA. The paper can be found at the following URL on the OSA website: http://www.opticsinfobase.org/oe/viewmedia.cfm?URI=oe-14-13-6020&seq=0&origin=search. Systematic or multiple reproduction or distribution to multiple locations via electronic or other means is prohibited and is subject to penalties under law.
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