Keywords

optics, XUV, ultraviolet light, moth's eyes, reflection, absorption, transmission, thin film

Abstract

Optics in the extreme ultraviolet (XUV) have important applications in microelectronics, microscopy, space physics, and in imaging plasmas. Because of the short wavelengths involved in these applications, it is critical to account for interfacial roughness to accurately predict the reflection and absorption of XUV optics. This paper examines two possible effects of roughness on optical absorption, non-specular reflection and enhanced transmission and compares these to measured experimental data on a rough Y2O3 thin film.

Original Publication Citation

R. Steven Turley, David Allred, Anthony Willey, Joseph Muhlestein, and Zephne Larsen, "Effective Medium Theory, Rough Surfaces, and Moth's Eyes," The Journal of the Utah Academy of Sciences, Arts, and Letters-29, 86, 273-286.